MKS E29H.1TBFL1B Heated Vacuum Manometer

MKS E29H.1TBFL1B Heated Baratron Capacitance Manometer

Product Introduction

The E29H.1TBFL1B belongs to the E29H series of heated absolute capacitance manometers from MKS Instruments. MKS designed this model for etch processes that require precise measurement in the low-pressure region. It features a 0.1 Torr full scale range and holds its sensor at a controlled 100°C. This heating action stops process byproducts from condensing inside the measurement chamber. Additionally, the integrated sump etch baffle protects the diaphragm from particulate contamination. Furthermore, the unit is fully compatible with earlier MKS 629 and E29 Baratron manometers, which makes replacement and system upgrades straightforward.

Technical Specifications

The measurement performance of this transducer centers on absolute pressure sensing at very low ranges. Specifically, the full scale range is 0.1 Torr, and the accuracy is 0.50% of Reading, covering non-linearity, hysteresis, and non-repeatability. Meanwhile, resolution reaches 0.001% of Full Scale, so small pressure changes remain detectable. The analog output provides 0 to +10 VDC into loads above 10 kOhm. Power requirements are ±15 VDC (±5%) at 0.50 A. For electrical connection, the unit uses a 9-pin D-sub connector with thread locks. Besides, the warm-up time is 4 hours, after which the sensor reaches thermal stability and delivers rated accuracy. The calibration is performed in the vertical orientation. However, this model has no heater status LED and no trip points, since it provides an analog output only.

Mechanical and Environmental Parameters

The sensor features an 8 VCR female fitting, and all wetted materials are Inconel for corrosion resistance. An integrated sump etch baffle (patented, US #5,822,685) shields the sensing element from process contamination. Internal volume is 6.3 cc. The overpressure limit is 45 psia (310 kPa). Operating temperature ranges from 15 to 40°C. Zero temperature coefficient is 0.01% FS/°C, and span temperature coefficient is 0.02% of Reading/°C. Dimensions are 3.15 in (80.0 mm) diameter with a 3.87 in (98.4 mm) body height and a 1.38 in (35.1 mm) stem. Finally, the unit is CE compliant.

Installation Guide

First, confirm that the vacuum line connection matches the 8 VCR female fitting on the E29H.1TBFL1B. Next, mount the sensor in the vertical orientation to match factory calibration. Then, connect the 9-pin D-sub cable and tighten the thread locks. After that, apply ±15 VDC power and allow a 4-hour warm-up for stable readings. Finally, verify the analog output against a reference gauge before running process gases. Therefore, proper orientation and warm-up are essential for accurate low-pressure measurement.

Packaging List

• MKS E29H.1TBFL1B sensor unit (1 pc)

• Protective shipping cap (1 pc)

Shipping via Fedex, UPS, or DHL.

FAQ

Q1: What is the full scale range of the E29H.1TBFL1B?
A: This sensor measures absolute pressure from 0 to 0.1 Torr with 0.50% of reading accuracy.

Q2: Can this unit replace older Baratron models?
A: Yes, the E29H.1TBFL1B is fully compatible with earlier MKS 629 and E29 Baratron manometers.

Q3: Why does this model need a 4-hour warm-up?
A: The longer warm-up supports thermal stability at the very low 0.1 Torr range, where small temperature shifts affect readings.

Q4: What fitting and wetted materials does this sensor use?
A: It uses an 8 VCR female fitting, and all wetted surfaces are Inconel with an integrated etch baffle.

Q5: Does the E29H.1TBFL1B have a heater status LED?
A: No, this model has no heater status LED and no trip points, since it provides an analog output only.