628H13TDE1B MKS Baratron 1000 Torr Sensor

Product Introduction

The 628H13TDE1B belongs to the MKS Instruments 628H series of heated Baratron capacitance manometers. This model targets severe vacuum processes that demand a higher sensor temperature. Its head stays controlled at 100°C, which prevents condensation of aggressive byproducts and keeps readings stable. As a result, the device suits etch, CVD, and other harsh semiconductor applications.

Additionally, the unit uses an NW16 ISO-KF fitting for quick clamp-style mounting on standard vacuum lines. Vertical calibration supports consistent performance in the intended orientation. The all-Inconel wetted sensor resists corrosion from reactive gases. Meanwhile, the compact body fits easily into crowded chamber layouts.

Technical Specifications

The 628H13TDE1B delivers reliable absolute pressure measurement for full-range vacuum control. Its accuracy of 0.25% of Reading covers non-linearity, hysteresis, and non-repeatability. Resolution reaches 0.001% of Full Scale, which supports fine process regulation. Warm-up time is 2 hours, and calibration is performed in the vertical position.

The analog output provides 0 to +10 VDC into loads above 10 kOhm. Power requires +/-15 VDC (+/-5%) at 0.60 A maximum. A 15-pin D-sub connector with thread locks ensures secure wiring. This version offers analog output only, so it has no trip relays. Furthermore, it omits the heater status LED found on other heated variants.

Mechanical and Environmental Parameters

The sensor diameter measures 3.15 in (80.0 mm), and body height is 3.87 in (98.4 mm). The stem adds 1.38 in (35.1 mm). Internal volume is only 6.3 cc, which supports fast response and low gas load. Wetted materials use Inconel for corrosion resistance in aggressive gas service.

The overpressure limit is 45 psia (310 kPa) or 120% of Full Scale, whichever is greater. Operating temperature ranges from 15 to 50°C. Zero temp coefficient is 0.002% FS/°C, and span temp coefficient is 0.02% of Reading/°C. Finally, the product carries CE compliance for European markets.

Installation Guide

First, verify the vacuum system is vented and at safe pressure before mounting. Install the NW16 ISO-KF fitting with a compatible clamp and centering ring. Next, connect the 15-pin D-sub cable to the controller or readout device. Confirm the +/-15 VDC supply meets the 0.60 A requirement.

Moreover, keep the transducer in a vertical orientation, because calibration is performed in that position. Allow 2 hours warm-up to reach rated accuracy. Route signal cables away from high-power lines to reduce noise. Finally, check the analog output against a reference gauge before process start.

Packaging List

• 1x MKS 628H13TDE1B heated Baratron transducer

• 1x 15-pin D-sub mating connector kit

• 1x Protective fitting cap

• 1x Installation and operation manual

Shipping via Fedex, UPS, or DHL. Transit time is typically 3-5 business days.

FAQ

Q1: What pressure range does the 628H13TDE1B cover?
A: The 628H13TDE1B measures absolute pressure up to 1000 Torr full scale.

Q2: Why does this model use a 100°C sensor heater?
A: The higher temperature prevents condensation of aggressive process byproducts, which keeps measurement stable in severe processes.

Q3: Does this model include trip relays or a heater status LED?
A: No. This version provides analog output only, with no trip relays and no heater status LED.

Q4: Why must the sensor stay in a vertical position?
A: The factory performs calibration in the vertical orientation, so mounting it vertically preserves rated accuracy.

Q5: What fitting does this model use?
A: It uses an NW16 ISO-KF fitting for quick clamp-style mounting on standard vacuum lines.