MKS E28H11TDE2B Absolute Pressure Manometer
Product Introduction
The E28H11TDE2B belongs to the MKS Instruments E28H series of 600 Series heated etch sensors. This absolute pressure manometer provides reliable measurement across a 10 Torr full scale range. Specifically, it maintains the sensor at a controlled 100°C to prevent process byproduct condensation. The unit is interchangeable with earlier 128, 628A/B/D, and E28B/D/F Baratron manometers, which simplifies fleet upgrades.
Technical Specifications
The E28H11TDE2B delivers 0.25% of reading accuracy, including non-linearity, hysteresis, and non-repeatability. Resolution reaches 0.001% of full scale. Calibration is performed in the vertical orientation. The analog output provides 0 to +10 VDC into loads above 10 kOhm. Power requirements are ±15 VDC (±5%) at 0.60 A maximum. A 15-pin D-sub connector with thread locks ensures secure interfacing. The heater status LED gives a clear visual indication of thermal state.
Mechanical and Environmental Parameters
The sensor features an NW16 ISO-KF fitting and all wetted materials are Inconel for corrosion resistance. An integrated sump etch baffle (patented, US #5,822,685) protects the sensor from process contamination. Internal volume is 6.3 cc. The overpressure limit is 45 psia (310 kPa) or 120% of full scale, whichever is greater. Operating temperature ranges from 15 to 40°C. Zero temperature coefficient is 0.002% FS/°C, and span temperature coefficient is 0.02% of reading/°C. Dimensions are 3.15 in (80.0 mm) diameter with a 3.87 in (98.4 mm) body height and 1.38 in (35.1 mm) stem. The unit is CE compliant.
Installation Guide
First, verify that the vacuum connection matches the NW16 ISO-KF flange on the E28H11TDE2B. Next, mount the sensor in the vertical orientation to match factory calibration. Then, connect the 15-pin D-sub cable and secure the thread locks. After that, apply ±15 VDC power and allow a 2-hour warm-up for stable readings. Finally, confirm the heater status LED is illuminated before introducing process gases.
Packaging List
Shipping via Fedex, UPS, or DHL.
FAQ
Q1: What is the full scale range of the E28H11TDE2B?
A: This sensor measures absolute pressure from 0 to 10 Torr with 0.25% of reading accuracy.
Q2: Can this unit replace older Baratron models?
A: Yes, the E28H11TDE2B is interchangeable with 128, 628A/B/D, and E28B/D/F Baratron manometers.
Q3: What is the purpose of the 100°C heating?
A: Heating prevents condensation of process byproducts inside the sensor, which maintains measurement stability in etch applications.
Q4: What wetted materials does the E28H11TDE2B use?
A: All wetted surfaces are Inconel, and the sensor includes an integrated etch baffle for extra protection.
Q5: How long is the warm-up time?
A: The manufacturer specifies a 2-hour warm-up period to achieve rated accuracy and thermal stability.
