MKS E28H 0.1 Torr Absolute Pressure Transducer

MKS E28H.1TBF5B Heated Etch Baratron Sensor

Product Introduction

The E28H.1TBF5B belongs to the MKS E28H series of heated etch sensor manometers. This absolute pressure transducer covers a 0.1 Torr full scale range, which suits low-pressure etch process control. Its sensor head stays controlled at 100°C, and this high heating level strongly suppresses byproduct deposition inside the measurement cavity. Therefore, the device keeps readings reliable through aggressive etch recipes.

Moreover, the unit is fully interchangeable with earlier 128, 628A/B/D, and E28B/D/F Baratron manometers. This drop-in compatibility allows simple upgrades without plumbing changes. Meanwhile, the horizontal calibration method guarantees consistent performance after installation in horizontal process lines.

Key Technical Specifications

The E28H.1TBF5B achieves 0.50% of reading accuracy, including non-linearity, hysteresis, and non-repeatability. Resolution reaches 0.001% of full scale for fine low-pressure detection. The analog output provides 0 to +10 VDC into loads above 10 kOhm. Power demand is +/-15 VDC (+/-5%) at 0.60 A maximum, which reflects the higher 100°C heater load.

Specifically, the measurement type is absolute, and the full scale range is 0.1 Torr. A 15-pin D-sub connector with thread locks handles electrical interfacing. The unit offers analog output only, so no trip points are available. Besides, no heater status LED is provided on this configuration.

Mechanical and Environmental Parameters

The E28H.1TBF5B uses an 8 VCR female fitting for leak-tight metal seal connections. Wetted materials are Inconel, which resists corrosive etch chemistries. An integrated sump etch baffle, patented under US #5,822,685, traps byproduct particles away from the diaphragm. Internal volume measures 6.3 cc.

The body diameter is 3.15 in (80.0 mm), with a body height of 3.87 in (98.4 mm) and a stem of 1.38 in (35.1 mm). Operating ambient temperature ranges from 15 to 40°C. Zero temperature coefficient is 0.01% FS/°C, and span temperature coefficient is 0.02% of reading/°C. Additionally, the overpressure limit reaches 45 psia (310 kPa) or 120% of full scale, whichever is greater.

Installation Guide

First, confirm that the etch tool line matches the 8 VCR female fitting and that mating glands are clean. Next, mount the E28H.1TBF5B in a horizontal orientation to match its horizontal calibration. Use new metal gaskets for the VCR joint and tighten to the specified torque.

Then, connect the 15-pin D-sub cable and secure the thread locks. Supply +/-15 VDC power within the +/-5% tolerance and verify the 0.60 A maximum draw. Afterward, allow a 4-hour warm-up before critical process measurements. Finally, route the 0 to +10 VDC output to a readout with input impedance above 10 kOhm.

Packaging List

• MKS E28H.1TBF5B heated etch Baratron sensor, 1 piece

• Protective shipping carton with foam inserts

• Product identification label on the body

FAQ

Q1: What full scale range does the E28H.1TBF5B offer?
A: It provides a 0.1 Torr absolute full scale range for low-pressure etch control.

Q2: Why is the sensor heated to 100°C?
A: High heating strongly reduces byproduct deposition and keeps the diaphragm clean during aggressive etch processes.

Q3: Is this model compatible with older Baratron units?
A: Yes. It is interchangeable with earlier 128, 628A/B/D, and E28B/D/F Baratron manometers.

Q4: Which fitting and wetted material does it use?
A: It uses an 8 VCR female fitting with Inconel wetted materials.

Q5: How is the E28H.1TBF5B shipped?
A: We ship via Fedex, UPS, and DHL with tracking provided.