MKS 629H13TDDL1B Heated Baratron Pressure Sensor

MKS 629H13TDDL1B Heated Baratron Pressure Sensor

Product Introduction

The 629H13TDDL1B belongs to the MKS 629H series of heated capacitance manometers. This absolute pressure sensor provides highly stable measurement across a 1000 Torr full scale range. Its sensor head stays controlled at 100°C, which minimizes condensation and drift inside the measurement chamber. Therefore, the device suits vacuum processes that demand long-term repeatability.

Engineers commonly deploy this transducer in semiconductor fabrication, thin-film deposition, and industrial vacuum systems. The improved temperature control electronics deliver superior long-term stability compared with standard unheated units. Meanwhile, the all-Inconel wetted path resists corrosive gases and protects measurement integrity.

Key Technical Specifications

The 629H13TDDL1B delivers 0.12% of reading accuracy, and this figure includes non-linearity, hysteresis, and non-repeatability. Resolution reaches 0.001% of full scale, so the sensor detects very small pressure changes. The analog output spans 0 to +10 VDC into loads above 10 kOhm. Power requirements are +/-15 VDC (+/-5%) at 0.60 A.

Specifically, the full scale range covers 1000 Torr with absolute measurement reference. The overpressure limit reaches 45 psia (310 kPa) or 120% of full scale, whichever is greater. External zero adjustment is not available, and no trip points are provided because the unit offers analog output only.

Mechanical and Environmental Parameters

The 629H13TDDL1B features a 3.15 in (80.0 mm) diameter body with a 3.87 in (98.4 mm) body height. The stem measures 1.38 in (35.1 mm), and internal volume equals 6.3 cc. Wetted materials consist of Inconel for corrosion resistance. The NW16 ISO-KF fitting enables quick clamp-type installation.

Operating temperature ranges from 15 to 40°C for the ambient environment. Zero temperature coefficient is 0.002% FS/°C, while span temperature coefficient reaches 0.02% of reading/°C. These low coefficients keep readings stable when room temperature fluctuates. Additionally, the 9-pin D-sub connector includes thread locks for secure cable attachment.

Installation Guide

First, verify that the vacuum line matches the NW16 ISO-KF flange and that the system pressure stays below the overpressure limit. Next, mount the 629H13TDDL1B with the pressure port oriented downward or horizontally to avoid particle accumulation. Use the clamp and centering ring to seal the KF connection properly.

Then, connect the 9-pin D-sub cable and tighten the thread locks. Supply +/-15 VDC power within the +/-5% tolerance and confirm the 0.60 A current draw. Afterward, allow a 2-hour warm-up period before taking critical measurements. Finally, route the analog output to a readout device with input impedance above 10 kOhm.

Packaging List

• MKS 629H13TDDL1B heated Baratron sensor, 1 piece

• Protective shipping carton with foam inserts

• Product identification label on the body

FAQ

Q1: What measurement type does the 629H13TDDL1B support?
A: It provides absolute pressure measurement with a 1000 Torr full scale range.

Q2: Why must the sensor warm up for 2 hours?
A: The 100°C heated head needs thermal stabilization to reach rated accuracy and stability.

Q3: Can I adjust zero externally on this model?
A: No. This configuration offers analog output only and provides no external zero function.

Q4: Which fitting does the 629H13TDDL1B use?
A: It uses an NW16 ISO-KF fitting with Inconel wetted materials.

Q5: How is the unit shipped?
A: We ship via Fedex, UPS, and DHL with tracking provided.