MKS 631F13TBFP High-Temp Absolute Sensor

Product Introduction

The 631F13TBFP belongs to the MKS Instruments 631F series within the 600 Series Baratron family. This high-temperature model controls its sensor to 200 degC, which prevents condensation of process byproducts in demanding semiconductor chambers. Such thermal performance suits CVD, etch, and other elevated-temperature vacuum steps. The 1000 Torr full scale range covers coarse vacuum measurement with reliable absolute readings.

This manometer achieves 0.50% of reading accuracy, covering non-linearity, hysteresis, and non-repeatability. Resolution reaches 0.01% of full scale with a 50 msec response time. Moreover, the compact self-contained design simplifies chamber integration. A 15-pin D-sub connector with thread locks secures the wiring in vibration-prone installations.

Technical Specifications

Measurement Performance

The 631F13TBFP provides absolute pressure measurement across a 1000 Torr span. Accuracy stays within 0.50% of Reading under specified conditions. Resolution is 0.01% of Full Scale, while response time is 50 msec. A warm-up time of 4 hours or less brings the 200 degC sensor to thermal equilibrium.

Electrical Characteristics

Power requirements are +/-15 VDC (+/-5%) at 1.0 A maximum. The analog output delivers 0 to +10 VDC into loads above 10 kOhm. A 15-pin D-sub connector with thread locks handles all wiring. This unit carries no trip point relays. Besides, fail-safe over-temperature protection guards the heater, and LED status lamps indicate At Temperature and Heater Failure states.

Pressure and Materials

The overpressure limit is 45 psia. Internal volume is a compact 6.3 cc. The fitting is an 8 VCR female type. Wetted materials include Inconel or Incoloy nickel alloys, which resist corrosion at 200 degC.

Mechanical and Environmental Parameters

The unit measures 3.15 inches (80.0 mm) in diameter with a body height of 4.55 inches (115.5 mm). The fitting stem extends 1.58 inches (40.0 mm). Operating temperature ranges from 15 to 50 degC. Ambient airflow of 150 ft/min at 40-50 degC is required for cooling. Zero temperature coefficient is 0.008% FS/degC, while span temperature coefficient is 0.02% of Reading/degC. The device carries CE compliance.

Installation Guide

First, mount the 631F13TBFP using the 8 VCR female fitting on a compatible vacuum port. Ensure mating surfaces are clean and free of contamination. Next, connect the 15-pin D-sub cable and secure the thread locks. Power the unit with +/-15 VDC and allow up to 4 hours warm-up so the 200 degC sensor stabilizes. Besides, confirm the At Temperature LED illuminates before taking readings. Finally, verify the analog output with a calibrated voltmeter.

Additionally, provide ambient airflow of 150 ft/min to protect the electronics at 40-50 degC. Route cabling away from the hot sensor body to avoid insulation damage. However, never exceed 45 psia overpressure to protect the diaphragm. For process integration, feed the analog output to your controller or data acquisition module.

Packaging List

• 1 x MKS 631F13TBFP Capacitance Manometer

• 1 x 15-Pin D-Sub Mating Connector

• 1 x Installation Guide

Shipping via Fedex, UPS, DHL.

FAQ

Q1: What is the full scale range of the 631F13TBFP?
A: The 631F13TBFP offers a 1000 Torr full scale absolute pressure range.

Q2: Why does this model heat the sensor to 200 degC?
A: The 200 degC sensor prevents byproduct condensation in demanding semiconductor processes.

Q3: Does this unit include trip point relays?
A: No, the 631F13TBFP carries no trip point relays.

Q4: What power supply does the 631F13TBFP require?
A: It needs +/-15 VDC (+/-5%) at 1.0 A maximum.

Q5: What cooling does the installation require?
A: The unit needs ambient airflow of 150 ft/min at 40-50 degC ambient temperature.