MKS 625H11TCEEU 100 degC Absolute Manometer

Product Introduction

The 625H11TCEEU belongs to the MKS Instruments 625H series within the 600 Series Baratron family. This heated model controls its sensor temperature to 100 degC, which keeps aggressive process byproducts in the vapor phase. Such high thermal stability proves essential in harsh etch, CVD, and other severe vacuum processes. The 10 Torr full scale range suits low-pressure applications that demand tight control.

This manometer achieves 0.25% of reading accuracy, covering non-linearity, hysteresis, and non-repeatability. Resolution reaches 0.001% of full scale. Moreover, the 0 to +10 VDC analog output integrates cleanly with system controllers. Two SPDT trip point relays each accept a 0.01 to 10 VDC level signal, enabling flexible process interlock configuration.

Technical Specifications

Measurement Performance

The 625H11TCEEU provides absolute pressure measurement across a 10 Torr span. Accuracy stays within 0.25% of Reading under specified conditions. Resolution is 0.001% of Full Scale, which supports fine pressure monitoring at low vacuum levels. A warm-up time of 2 hours allows the heated sensor to reach thermal equilibrium before critical measurements.

Electrical Characteristics

Power requirements are +/-15 VDC (+/-5%) at 0.60 A maximum. The analog output delivers 0 to +10 VDC into loads above 10 kOhm. A terminal block adaptor handles all wiring connections. Each trip point accepts a 0.01 to 10 VDC level signal. The two relays are SPDT, rated 1 A at 30 VDC or 0.5 A at 30 VAC resistive, with source impedance at 12.5 kOhm maximum.

Pressure and Materials

The overpressure limit is 45 psia (310 kPa). Internal volume is a compact 6.3 cc. The fitting is an 8 VCR female type. Wetted materials consist of Inconel, which resists corrosion and maintains integrity at the elevated 100 degC sensor temperature.

Mechanical and Environmental Parameters

The unit measures 3.15 inches (80.0 mm) in diameter with a body height of 3.87 inches (98.3 mm). The stem extends 1.38 inches (35.1 mm). Operating temperature ranges from 15 to 50 degC. Zero temperature coefficient is 0.002% FS/degC, while span temperature coefficient is 0.02% of Reading/degC. The device carries CE compliance.

Installation Guide

First, mount the 625H11TCEEU using the 8 VCR female fitting on a compatible vacuum line. Ensure mating surfaces are clean and free of contamination. Next, connect the terminal block adaptor wiring per the pinout diagram. Power the unit with +/-15 VDC and allow 2 hours warm-up so the 100 degC sensor stabilizes. Besides, verify the analog output with a calibrated voltmeter. Finally, configure each trip point by applying the desired 0.01 to 10 VDC level signal.

Additionally, maintain ambient temperature between 15 and 50 degC for rated accuracy. The heated sensor reaches 100 degC, so route cabling away from hot surfaces. However, never exceed 45 psia overpressure to protect the diaphragm. For process integration, route relay outputs to your alarm panel or PLC input module.

Packaging List

• 1 x MKS 625H11TCEEU Capacitance Manometer

• 1 x Terminal Block Adaptor

• 1 x Installation Guide

Shipping via Fedex, UPS, DHL.

FAQ

Q1: What is the full scale range of the 625H11TCEEU?
A: The 625H11TCEEU offers a 10 Torr full scale absolute pressure range.

Q2: Why does this model heat the sensor to 100 degC?
A: The 100 degC sensor prevents condensation of aggressive byproducts in severe processes.

Q3: How are the trip points configured?
A: Each of the two SPDT relays accepts a 0.01 to 10 VDC level signal.

Q4: What power supply does the 625H11TCEEU require?
A: It needs +/-15 VDC (+/-5%) at 0.60 A maximum.

Q5: What fitting and wetted material does the sensor use?
A: The unit uses an 8 VCR female fitting with Inconel wetted materials.