Product Introduction
The 631F11TMFHAA belongs to the MKS Instruments 631F series of heated Baratron capacitance manometers. This model measures absolute pressure up to 10 Torr with high stability. Its sensor head stays controlled at 150°C to prevent process byproduct condensation. As a result, the device suits demanding vacuum processes in semiconductor, coating, and industrial vacuum systems.
Furthermore, the unit includes two above-set-point solid-state trip relays. These relays support simple interlock and alarm functions without extra hardware. The 1.5 inch TriClover sanitary fitting enables fast, clean installation on process lines.
Technical Specifications
The 631F11TMFHAA delivers precise absolute pressure measurement across its full scale range. Its accuracy of 0.50% of Reading covers non-linearity, hysteresis, and non-repeatability. Resolution reaches 0.01% of Full Scale, and response time is 50 msec. Warm-up takes 4 hours or less.
The analog output provides 0 to +10 VDC into loads above 10 kOhm. Power requires +/-15 VDC (+/-5%) at 1.0 A maximum. The 15-pin D-sub connector with thread locks ensures secure wiring. Two solid-state relays energize above set point, and each contact rates 0.20 A at 30 VDC.
Mechanical and Environmental Parameters
The sensor diameter measures 3.15 in (80.0 mm), and body height is 4.55 in (115.5 mm). The fitting stem adds 1.58 in (40.0 mm). Internal volume is only 6.3 cc, which supports fast response and low gas load. Wetted materials use Inconel or Incoloy nickel alloys for corrosion resistance.
The overpressure limit is 45 psia. Operating temperature ranges from 15 to 50°C. At 45-50°C ambient, the unit needs 50 ft/min airflow. Zero temp coefficient is 0.004% FS/°C, and span temp coefficient is 0.02% of Reading/°C. Finally, the product carries CE compliance.
Installation Guide
First, verify the vacuum system is vented and at safe pressure before mounting. Install the 1.5 inch TriClover fitting with a compatible clamp and gasket. Next, connect the 15-pin D-sub cable to the controller or readout device. Confirm the +/-15 VDC supply meets the 1.0 A requirement.
Moreover, allow 4 hours warm-up to reach rated accuracy. Keep ambient airflow at 50 ft/min when the surrounding temperature exceeds 45°C. Route signal cables away from high-power lines to reduce noise. Finally, set trip relay thresholds through the readout electronics before process start.
Packaging List
1x MKS 631F11TMFHAA heated Baratron transducer
1x 15-pin D-sub mating connector kit
1x Protective fitting cap
1x Installation and operation manual
Shipping via Fedex, UPS, or DHL. Transit time is typically 3-5 business days.
FAQ
Q1: What pressure range does the 631F11TMFHAA cover?
A: The 631F11TMFHAA measures absolute pressure from zero to 10 Torr full scale.
Q2: Why does the sensor run at 150°C?
A: The heated sensor prevents condensation of process byproducts, which keeps measurement stable and reduces drift.
Q3: Can the trip relays control external alarms?
A: Yes. Two solid-state relays energize above set point and handle 0.20 A at 30 VDC.
Q4: What fitting does this model use?
A: It uses a 1.5 inch TriClover sanitary fitting for quick, clean mounting.
Q5: How long is the warm-up time?
A: Warm-up takes 4 hours or less to reach full specified accuracy.
